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3535. 466. "Microlithography by Using Neutral Metastable Atoms and Self-Assembled Monolayers", Berggren, K. K., Bard, A., Wilbur, 3. L., Gillaspy, I. D., Helg, A. G., McClelland, 3. 3., Rolston, S. L., Phillips, W. D., Prentiss, M. and Whitesides, G. M., Science, 1995, 269, 1255-1257. http://gmwgrou

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